Rapid Gas Extraction/Combined Use with Other Pumps
Working Conditions
Work Under Both Wet and Dry Conditions
Weight
133kgs
Nominal Pumping Speed
253m3/3043/H(50Hz/60Hz)
Pumping Speed
210m3/H
Type of Protection
IP55
Motor Power Max.
1.1kw(50Hz)
Noise Level
64 dB(a)
Nominal Speed
3000/3600rpm
Fast Delivery
Yes
Transport Package
Standard Export Packaging
Specification
1080*620*680mm
Trademark
RUVAC
Origin
China
HS Code
8414100090
Production Capacity
2000pieces/Year
Product Description
General Introduction The WAU251 is a Roots blower vacuum pump, part of the RUVAC WAU series, known for its reliability, safety, and ruggedness.
Technical Parameters - Nominal Pumping Speed: 253 m³/h at 50 Hz and 304 m³/h at 60 Hz.
- Rotational Speed: 3000 rpm at 50 Hz and 3600 rpm at 60 Hz.
- Max. Permissible Pressure Difference: 80 mbar during continuous operation.
- Connection Flange: DN 63 ISO-K.
- Electrical Supply Voltage: 3-phase, 60 Hz, 208 - 230 VAC / 460 VAC.
Features and Advantages - Easy Startup: Equipped with a pressure differential valve, allowing it to start simultaneously with the roughing pump even at atmospheric pressure.
- Flexible Installation: Can be installed in either vertical or horizontal position, providing flexibility in system design.
- Energy Efficiency: The entire WA(U) range complies with the energy efficiency class IE3.
- Quiet Operation: Rugged bearings and highly efficient lubrication systems contribute to quiet running.
Applications - Vacuum Coating: It is widely used in the vacuum coating industry, such as in physical vapor deposition (PVD) and chemical vapor deposition (CVD) processes to achieve high-quality film deposition.
- Heat Treatment and Metallurgy: In heat treatment furnaces and metallurgical processes, the WAU251 helps to create and maintain the required vacuum environment for precise material processing.
- Architectural Glass Coating: Standard equipment in the architectural glass coating industry, combined with other pumps to realize short pump-down times at load lock chambers.
- Semiconductor Industry: Used in semiconductor manufacturing processes, such as in the production of silicon wafers and integrated circuits, to ensure a clean and stable vacuum environment.
Maintenance and Service
The WAU251 is designed for easy maintenance. Regular checks of the oil level, seals, and bearings are recommended. The pump's modular design allows for quick and convenient replacement of components if needed.
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